Profilometer
GBScope – 3D Profiler
with an excellent price performance ratio
GBScope – 3D Profiler
Description:
The manual and optional motorized turret simplifies the operation of the fast optical profiler with a measuring volume of 100 x 100 x 50 mm³ (xyz) and optional configuration up to 300 x 300 x 100 mm³. The turret allows the easy localization of small features using low magnification objectives with instant exchange of the objective for measure-ments.
The system is an optimized solution for the measurement of any surfaces except super polished optical and semiconductor surfaces. It is ideal for measuring labs and research and development requiring data of the surface texture, roughness, and dimension of micro geometries.
Key Features:
- Coherence scanning (white-light) interferometry
- Superior height resolution based on HD-EPSI and profile averaging
- Excellent calibration for superior measurements
- SmartSTITCH the basis for correct high resolution. large area measurements
- Increased acceptance angles
- Outlier free scanning – black silicon
- Excellent and objective tested lateral resolution / smartWLI nanoscan 115x objective
- ISO conform specified lateral period limit DLIM
- For the smartWLI series
Specification:
- Optical 3d profiler - optical 3d profiler with motorized xyz portal
- Objectives - objective turret with up to 4 objectives
- Objective magnifications - 5x – 115x
- Tube magnification - 0.5x
- Measuring principle - coherence scanning (white-light) interferometer
- Scanning device - large range z – stage
- Topography reproducibility - 0.5 nm (single scan without profile averaging)
- Repeatability RMS - 0.05 nm (single scan without profile averaging)
- Measuring volume - 100 x 100 x 50 mm' (xyz) / optional up to 300 x 300 x 100 mm* (xyz)
- High speed camera - 2.3 MP camera up to 3.2 kfps
- Point evaluation - massive parallel in real time on the GPGPUs
- Evaluation algorithms VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry)
Applications:
- Wafer Metrology
- Machined Surfaces
- Surface Roughness Standards
- Measurement of cutting edges
- Tribology
- Micro geometries
- Cylinder surfaces
- Laser structures surfaces
- Galvanic deposit surfaces
- Grinding tools
- Electronical components
- Additive manufactured surfaces (3d printing)
- Optical components
- Biomedical research
- Flatness measurement
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