Profilometer
smartWLI Compact
universal high-performance sensor
Description:
The sensor combines compact dimensions with an excellent resolution and an affordable price. Available with 2 different cameras and a single, manual exchangeable objective make the sensor a good choice for repeated measurements of similar samples and measuring tasks which require similar lateral resolutions.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI compact as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.
Key Features:
- Coherence scanning (white-light) interferometry
- Superior height resolution based on HD-EPSI and profile averaging
- Excellent calibration for superior measurements
- SmartSTITCH the basis for correct high resolution. large area measurements
- Increased acceptance angles
- Outlier free scanning – black silicon
- Excellent and objective tested lateral resolution / smartWLI nanoscan 115x objective
- ISO conform specified lateral period limit DLIM
- For the smartWLI series
Specification:
- Optical 3D Sensor - optical 3d sensor
- Objectives - single objective / manual exchangeable
- Objective magnifications - 2.5x – 115X
- Tube magnification - 0.5x
- Measuring principle - coherence scanning (white-light) interferometer
- Scanning device - 400 pm piezo stage with close loop capacity control
- Topography reproducibility 0.05 nm (single scan without profile averaging)
- Repeatability RMS - 0.005 nm (single scan without profile averaging)
- Optional stands - manual and motorized stands
- High speed camera - 2.3 MP camera up to 3.2 kfps / 5 MP camera up to 2 kfps
- Point evaluation - massive parallel in real time on the GPGPUs
- Evaluation algorithms - VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry) / HD (high density extended phase shift interferometry)
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