Specialized AFM
PARK NX-Hivac
The ideal choice for failure analysis and air-sensitive materials research
PARK NX-Hivac
Description:
NX-Hivac is a high-vacuum atomic force microscope (AFM) engineered for advanced semiconductor and materials research, enabling precise nanoscale analysis of air-sensitive samples. By providing clean and stable measurement conditions, the NX-Hivac has established itself as a trusted platform in both academic and industrial laboratories.
At the core of the NX-Hivac are Park’s proprietary orthogonal scan system and True Non-contact™ mode, enhanced by high-vacuum capability. Together, these technologies protect delicate samples and enable accurate characterization of topographical, mechanical, and electrical properties that are not achievable under ambient or dry nitrogen (N₂) conditions.
From semiconductor devices to air-sensitive materials, the NX-Hivac delivers consistent performance and reliable results. With support for advanced modes and features such as automated vacuum control, it offers researchers a comprehensive solution for high-vacuum AFM studies.
Key Features:
High-Vacuum AFM Capabilities
- Stable High-Vacuum Environment
- Air-Sensitive Material Property Analysis
- Motorized Photodetector (A–B) Alignment
- Automated Vacuum Control
- Intuitive Laser Beam Alignment
- Automatic Laser Beam Alignment
- Multi-Sample Loading without Breaking Vacuum
Outstanding AFM Performance
- True Non-Contact™ Mode
- Orthogonal Scan System
- Fast Z-Servo Speed
- Easy Probe Exchange
- Comprehensive Selection of AFM Modes
Specification:
-
Scanner
XY scanner (50 µm × 50 µm or 100 µm × 100 µm)
Flexure-guided high-force Z scanner (15 µm or 30 µm) -
Sample Mount
Up to 4 small samples with magnetic sample chuck
10 mm × 10 mm (w × d), up to 20 mm thickness
Up to 100 mm × 100 mm (w × d) w/o multi-sample chuck -
Stage
XY stage: 22 mm × 22 mm
Z stage: 24 mm
Focus stage: 11 mm -
On-axis Optical Microscope
Direct on-axis vision of sample surface and cantilever
Field of view: 840 µm × 630 µm (w/ 10 × objective lens)
CCD: 5 M Pixel -
High Vacuum Control
Vacuum Level: Typically, down to 10-5 Torr
Pumping Speed: < 5 min to 10-5 Torr
Applications:
- Unique applications: Copper foil, Lithium-ion battery electrode, Nickel-Cobalt-Aluminum oxide of Li-ion battery, Mica
- Material & Chemistry: 2D material, Polymer, Blended Polymer, Plastic, Coating, Thin film, Catalyst
- Life Science: Fixed or Living cell membrane, Biomolecular interaction, Tissue, DNA, Bacteria or Virus
- Metal & Semiconductor: Failure analysis on Semiconductor device, Measurements on nanoelectronic device, Thin-film electronics component
- Battery & Energy: Battery material, Fuel cell, Energy harvesting, Ionic conductor
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