Ellipsometer
Accurion RSE
Referenced Spectroscopic Ellipsometry Fast Inspection of Thin Films and Surfaces
Accurion RSE
Description:
The Referenced Spectroscopic Ellipsometer (RSE) is an ellipsometer-based reflectometer, designed for high-speed thickness mapping in, e.g., quality control. It allows to accurately measure of thicknesses ranging from 0.1 nm – 10 μm. With 200 complete spectra recorded per second, a 100 mm x 100 mm area can be investigated in only 12 minutes while acquiring 67,000 spectra.
Key Features:
- "Single-shot“ referenced spectroscopic ellipsometric measurements
- Data rate of 200 spectra per second
- Live data processing for evaluation of film thickness
- Spot size: 25 x 40 µm micro spot at AOI = 60°
- Film thickness range: < 1nm – 10 µm
- Spectral range: 450 – 900 nm
Specification:
- Angle of Incidence - 60°
- Spectral Range - 450-900 nm, 1.2 nm resolution
- Data Rate - 200 full spectra per second
- Spot Size - Up to 25 x 40 µm microspot (standard: 200 x 50 µm microspot)
- Film-Thickness Resolution - Typ. 0.01 nm
- Roughness Tolerance - Max. 50 nm Ra
- Height Tolerance - ±50 µm
- Working Distance - 12.5 mm
- Effective Measurement Time - Full 4“-wafer map at 140 µm x 500 µm resolution in 12 min (112.000 spectra), incl. modeling
- Light Source - 110 mW supercontinuum laser, class 3b, M² = 1.1
- X-Y-Z-Positioning - Motorized X-Y-Stage with up to 300 mm range, max. 100 mm/s, motorized Z-positioning in instrument head with 40 mm range
Applications:
- Wafer Inspection
- Detection of Contaminants
- Thickness of Ultrathin Films and Interlayers
- Thin Layers on Transparent Substrates
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