Profilometer
SmartWLI GB Scanner
3D profiler for fast and reliable roughness measurements
GB Scanner
Description:
The smartWLI GBScanner is a fast optical profiler with sub nanometer topography reproducibility. By using a motorized 3-axis tripod for scanning and positioning with a measuring volume of 100 x 100 x 50 mm³ (xyz) an extension up to 300 x 300 x 100 mm², the system can be used for the measurement of medium seize samples. The 3d data will be evaluated in MountainsMap and allows automated push button scan and data evaluations using customized evaluation macros.
Key Features:
- Coherence scanning (white-light) interferometry
- Superior height resolution based on HD-EPSI and profile averaging
- Excellent calibration for superior measurements
- SmartSTITCH the basis for correct high resolution. large area measurements
- Increased acceptance angles
- Outlier free scanning – black silicon
- Excellent and objective tested lateral resolution / smartWLI nanoscan 115x objective
- ISO conform specified lateral period limit DLIM
- For the smartWLI series
Specification:
- Optical 3d profiler - optical 3d profiler with motorized xyz portal
- Objectives - objective turret with up to 4 objectives
- Objective magnifications - 5x – 115x
- Tube magnification - 0.5x
- Measuring principle - coherence scanning (white-light) interferometer
- Scanning device - large range z – stage
- Topography reproducibility - 0.5 nm (single scan without profile averaging)
- Repeatability RMS - 0.05 nm (single scan without profile averaging)
- Measuring volume - 100 x 100 x 50 mm' (xyz) / optional up to 300 x 300 x 100 mm* (xyz)
- High speed camera - 2.3 MP camera up to 3.2 kfps
- Point evaluation - massive parallel in real time on the GPGPUs
- Evaluation algorithms VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry)
Applications:
- Wafer Metrology
- Machined Surfaces
- Surface Roughness Standards
- Tribology
- Laser structures surfaces
- Laser structures surfaces
- Galvanic deposit surfaces
- Galvanic deposit surfaces
- Cylinder surfaces
- Grinding tools
- Flatness measurement
- Optical components
- Additive manufactured surfaces (3d printing)
- Electronical components
- Micro geometries
- Biomedical research
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