Large Sample AFM
PARK NX20
The leading nanometrology tool for failure analysis and large sample research
PARK NX20
Description:
Park NX20 is a flagship atomic force microscope (AFM) designed for large-sample research, delivering unmatched accuracy, reliability, and ease of use. As Park Systems’ original 200 mm sample AFM, it has earned global recognition in both academic and industrial laboratories for producing precise, repeatable nanoscale measurements.
At the core of NX20 are Park Systems’ proprietary orthogonal scan system and True Non-contact™ mode, innovations that virtually eliminate lateral motion artifacts while protecting both tip and sample. Together, these technologies ensure artifact-free, high-resolution imaging even for the most delicate or challenging samples.
From materials science and semiconductors to polymers and bioengineering, NX20 delivers robust performance and dependable results, making it a trusted platform for advanced nanoscale metrology.
Key Features:
- Outstanding NX Mechanical Design
- Fast Z Servo and High Resolution
- NX Laser Beam Path
- Pre-Mounted Probe
- Improved Z Scan Straightness
- Simple Expansion Slot for Modes and Options
- On-Axis Optical Microscope
- Industry Leading Low Noise Z Detector
Specification:
- Scanner - Dual-servo XY scanner (100 µm × 100 µm or 50 µm × 50 µm) Flexure-guided high-force Z scanner (15 µm or 30 µm)
- Sample Mount - Vacuum grooves for wafers (up to 200 mm)
- Magnetic mount - for 16 small samples (optional)
- Stage - XY stage: 200 mm × 200 mm Z stage: 25 mm
- Focus stage - stage: 8 mm Dimension and Weight
- On-axis Optics -Optical Microscope Direct on-axis vision of sample surface and cantilever Field of view: 840 µm × 630 µm (w/ 10× objective lens) CCD: 5 M pixels
Applications:
- Material & Chemistry: Few-layer MnBi₂Te₄ (MBT), surface of PVDF, Graphene on hexagonal boron nitride Blended Polymer, Plastic, Coating, Thin film, Catalyst, Ge atom layer etching (ALE) on Patterned Wafer, Li-ion Battery on Si substrate, Ta/NiFe/Ta Pattern, CMP test key
- Life Science: adenovirus sample with a DNA bundle, Fixed or Living cell membrane, Biomolecular interaction, Tissue, DNA, Bacteria or Virus
- Metal & Semiconductor: Failure analysis on Semiconductor device, Measurements on nanoelectronic device, Thin-film electronics component
- Battery & Energy: Battery material, Fuel cell, Energy harvesting, Ionic conductor
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